Simulation of Electron Injection and Charging Processes in Ferroelectrics Modified with the SEM-Techniques

Abstract

The paper presents results of a computer simulation of dynamic processes caused by electron injection and charging-up effects in ferroelectrics irradiated by electron bunches with average energy. The implementation of electron transport simulation in ferroelectrics was performed by Monte-Carlo method to express the initial volume charge distribution. The calculation of charging characteristics was based on solution of Poisson equation using finite element method. The calculated distribution of potential as well as field intensity electron beam-induced for model sample were analyzed at given experimental parameters.