Application of Macro-micro Dual-drive System in Micro-EDM

Author:

Zhu Guo Zheng1,Bai Ji Cheng1,Guo Yong Feng1,Ma Hu Liang1,Liu Yan Wu1

Affiliation:

1. Harbin Institute of Technology

Abstract

Micro-EDM technology has the advantages of no-contact and no-cutting force, it has been used in many fields. In order to use micro-EDM to machine proprietary micro array holes, which needs high precise of hole spacing and consistent hole diameter, a new macro-micro dual-drive system of micro-EDM have been made. It uses macro drive to move to a place, measures the error with the high precise grating, and uses micro drive to compensate the error. Online measurement proved that this method has important value if it will be used in micro-EDM.

Publisher

Trans Tech Publications, Ltd.

Subject

General Engineering

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Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Research and Application of Macro-Micro Linear Feed System;2023 International Seminar on Computer Science and Engineering Technology (SCSET);2023-04

2. Recent Development for Ultra-Precision Macro–Micro Dual-Drive System: A Review;Machines;2023-01-11

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