Affiliation:
1. Dalian University of Technology
Abstract
In order to improve the efficiency and reduce the cost of sapphire crystal machined by loose abrasive lapping, the fixed-abrasive diamond grinding tools for sapphire grinding were investigated in this paper. Four vitrified-resin composite bond diamond grinding tools with different grain sizes (40μm, 20μm, 7μm, 2.5μm) were developed. The grinding experiments were performed with the developed diamond grinding tools and the grinding performance of four grinding tools were evaluated by comparing the surface roughness and the material removal rate (MRR) of sapphire. The experiment results show that with the increase in grain size, both the MRR and the surface roughness increase. A high-efficiency and high-quality ultra-precision grinding process using diamond grinding tools with different grain sizes was proposed.
Publisher
Trans Tech Publications, Ltd.
Reference8 articles.
1. M.S. Akselrod, F.J. Bruni, Modern trends in crystal growth and new applications of sapphire, Cryst. Growth, 360 (2012) 134-145.
2. X.H. Niu, Y.L. Liu, B. M. Tan, et al. Method of surface treatment on sapphire substrate, Trans Nonferrous Met Soc China, Supplement 2 16 (2006) 732-734.
3. Kasman, E. and M. Irvin. Waste reduction in lapping sapphire and other compound semiconductor materials. in CS MANTECH Conference, Portland, Oregon, USA. (2010).
4. Z.G. Dong, S. Gao, P. Zhou, et al. Grinding Performance Evaluation of the Developed Chemo-Mechanical Grinding (CMG) Tools for Sapphire Substrate, Adv. Mater. Res., 565 (2012) 105-110.
5. B.H. Lv, J.L. Yuan, Y.X. Yao, Study on fixed abrasive lapping technology for ceramic balls, Mater Sci Forum, 532- 533 (2006) 460- 463.
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1 articles.
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