Continuous Path Tracking System of High Precision Stage Using Synchronous Piezoelectric Device Driver-Reference-Cited by-同舟云学术

Continuous Path Tracking System of High Precision Stage Using Synchronous Piezoelectric Device Driver

Published:2006-02 Issue: Volume:11-12 Page:121-124
ISSN:1662-8985
Container-title:Advanced Materials Research
language:
Short-container-title:AMR

Author:

Minh T.N.¹,Ohishi Kiyoshi¹,Takata Masasuke¹,Hashimoto Seiji²,Kosaka K.³,Kubota Hiroshi⁴,Ohmi Tadahiro⁵

Affiliation:

1. Nagaoka University of Technology

2. Gunma University

3. Tech-Concierge Kumamoto Inc.

4. Kumamoto University

5. Tohoku University

Publisher

Trans Tech Publications, Ltd.

Subject

General Engineering

Link

https://www.scientific.net/AMR.11-12.121.pdf

Reference6 articles.

1. K. Uchino, Smart Mater. Struct. 7 (1998), p.273.

2. S. Hashimoto, K. Ohishi, T. Ohishi, T. Ishikawa, K. Kosaka, Y. Egashira, H. Kubota and T. Ohmi: IEEE Trans. Mechatronics Vol. 7 (2003), p.1331.

3. L. Ljung: System Identification - Theory for the User, 2nd ed. (Prentice-Hall, 1999). Fig. 7. Ramp input tracking performance of C(z) and FC. Fig. 8. Step input tracking performance of C(z) and FC. Fig. 9. Sinus input tracking performance of C(z), FC, and CPTS.

4. T. Miyazaki and K. Ohishi: IEEE/ASME Trans. Mechatronics Vol. 7 (2002), p.235.

5. S. Manabe: 14th IFAC Symp. on Automatic Control in Aerospace (1998), Korea.

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