Development of Novel Nano-Structure Functional Coatings with the Use of the Original Hybrid Device

Abstract

A unique, original hybrid technological device, developed by the authors of the article, enabling the application of lots of different surface engineering methods in one technological process, including arc evaporation, ion nitriding, ion etching, ion implantation and electron beam evaporation is presented. The hybrid technological device has technical possibilities for the simultaneous realisation of different surface engineering methods in the same vacuum chamber. This results in the realization of advanced technological processes with the use of different surface engineering methods for forming the coating’s properties in one multi-stage technological process. Different surface engineering methods use different plasma sources and different methods of the atmosphere creation and often require different supply and control systems. A possibility of combining a few different surface treatment methods in one technological process is provided by a unique hybrid device. Selected applications of hybrid surface engineering technologies executed with the use of this original hybrid device, i.e. creation of the nano-multilayer and nano-composite Cr/Ni-Cr3C2coatings increasing the erosion wear resistance and creation of multi-layer coatings with increased thermal resistance – Thermal Barrier Coating (TBC) are presented