Comparative Evaluation of Anode Layers on the Electrical Characteristics of High Voltage 4H-SiC PiN Diodes
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Published:2008-09
Issue:
Volume:600-603
Page:1003-1006
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ISSN:1662-9752
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Container-title:Materials Science Forum
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language:
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Short-container-title:MSF
Author:
Losee Peter A.1,
Wang Y.2,
Li Can Hua2,
Sharma Santosh K.,
Bhat I.2,
Chow T. Paul2,
Gutmann Ronald J.2
Affiliation:
1. General Electric Global Research Center
2. Rensselaer Polytechnic Institute
Abstract
The impact of anode layers on the electrical characteristics of 10kV 4H-SiC PiN diodes
has been evaluated in this work. Co-fabricated diodes with various epitaxial anode layer designs as
well as those employing P+ implanted injecting layers are used to experimentally investigate the
device conduction mechanisms. The role of the injecting layer is demonstrated via electrical
characteristics and numerical simulations, showing the importance of maintaining sufficient carrier
recombination lifetime in the device anode region.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science