Characterization of Thin Layer SnO2/Glass by Neutrons Reflectometry
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Published:2009-01
Issue:
Volume:609
Page:155-160
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ISSN:1662-9752
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Container-title:Materials Science Forum
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language:
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Short-container-title:MSF
Author:
Khelladi Mohamed Fadel1,
Izerrouken M.2,
Kermadi S.3,
Tala-Ighil R.3,
Sali Samira3,
Boumaour M.3
Affiliation:
1. USTHB
2. Centre de Recherche Nucléaire de Draria (CRND)
3. Unité de Développement de la Technologie du Silicium – UDTS
Abstract
The thermal annealing behavior of the SnO2 thin films elaborated by sol-gel method has been studied by the neutrons reflectivity technique. From the fit of the experimental data using Parratt32 software program developed at HMI, Berlin, scattering length density, thickness and roughness are extracted. The obtained results show that the film thickness increases with the increasing annealing temperature, and the roughness is higher at 500 °C. Whereas, approximately, the same scattering length density is obtained after each annealing temperature.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science