Affiliation:
1. Beijing Institute of Technology
Abstract
The paper developed a set of small split Hopkinson pressure/tensile bar testing system (SSHPB/SSHTB) to study the dynamic characteristics of the micro-electromechanical system (MEMS) material and components, by which the dynamic characteristics of MEMS nickel material and planar S-form micro-spring were got. The dynamic Youngs modulus of LIGA nickel under the strain rate of 2×103s-1 got by the SSHPB is about 250GPa, which is slightly higher than that under static condition. The deformation peculiarity of the planar S-form micro-spring is also got by the SSHTB, which is uneven due to the spreading of the stress wave in the micro-spring. The result of the paper is valuable for providing feasible directions to the optimization design and manufacture of the MEMS components.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference8 articles.
1. Shi Gengchen, Micro-electromechanical System Technology, National Defence Industry Press, Beijing, (2002).
2. Li Yulong, Guo Weiguo, Xu Fei, et al, The extended application of Hopkinson bar technique, J. Explosion and Shock Waves. 26 (2006) 385-394.
3. Koichi Ishikawa, Hiroyuki Watanabe, Toshiji Mukai, High strain rate deformation behavior of an AZ91 magnesium alloy at elevated temperatures, J. Materials Letters. 59 (2005) 1511-1515.
4. Chen Xiaohong, Wu Hengyi, Huang Wen, et al, Experimental technique for high temperature tensile impact, J. Journal of Experimental Mechanics. 18 (2003) 39-44.
5. Niranjan K. Naik, Ravikumar Gadipatri, Narasimha Moorthy Thoram, Shear properties of epoxy under high strain rate loading, J. Polymer Engineering and Science. 50 (2010) 780-788.
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1 articles.
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