Study and Fabrication of Multi-Band Filter Film on ZnS Substrate-Reference-Cited by-同舟云学术

Study and Fabrication of Multi-Band Filter Film on ZnS Substrate

Published:2013-05 Issue: Volume:552 Page:147-151
ISSN:1662-9795
Container-title:Key Engineering Materials
language:
Short-container-title:KEM

Author:

Zhang Jing¹,Sun De Gui¹,Fu Xiu Hua¹,Liu Dong Mei¹

Affiliation:

1. Changchun University of Science and Technology

Abstract

In order to satisfy the special requirements of IR optical instrument, multi-band filter film on the substrate of ZnS is deposited by adopting electron beam vacuum depositing method with the ion assistant deposition technology. At incident angle of 0°～25°, 660nm high reflection and 1064nm and 3～5μm high transmission are realized. ZnS and YbF3 are selected as the high and low refractive index materials, and the film structure prepared easily is getting by optimizing the film system design curve ceaselessly. The precision of thickness control has been improved by adjusting film process parameters and improving film thickness control methods. The adhesion and firmness of film and substrate has been increased by pre-coating and mixed evaporation technology, and the laser induced damage threshold of film has been improved with vacuum annealing. The deposited film can endure the environmental tests such as rain pour, salt fog, and high and low temperature etc, and meet its practical requirement.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://www.scientific.net/KEM.552.147.pdf

Reference8 articles.

1. Gong Dawei, Fu Xiuhua et al. Design and manufacture of infrared double waveband laser filter films[J]. China Optics, 2011, 4（3）：293-296.

2. Wang Yizhe, Zhou Furong, Zhang Fengshan. Design and fabrication of wide three-band infrared antireflection coatings for Ge window from 3. 5-12. 5μm[J]. Optics ＆Optoelectronic Technology, 2005, 3(1): 32-34.

3. Fu Xiu hua, Jiang Huilin, Fu Xinhua et al . Study on multiwaveband infrared antireflection and protection film [ J ] . Acta Armamentarii, 2007, 28( 10) : 1183~ 1184.

4. Pan Yongqiang, Hang Lingxia, Liang Haifeng et al. . Ultrabroadband and hard infrared antireflection coatings on ZnSe f or 2~ 16μm[ J] . Acta Optica Sinica , 2010, 30(4): 1201~ 1204.

5. R. Anton, H. Hagedorn, A. Schnellbbuegel et al. Ion assisted deposition of high quality thorium-free antireflection coatings for high-power CO2 lasers[C]. SPIE, 1993, 2114: 288-296.

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Multispectral Anti-Reflection Coatings Based on YbF3/ZnS Materials on ZnGeP2 Substrate by the IBS Method for Mid-IR Laser Applications;Crystals;2022-10-05

2. Fabrication of Filter Film Using in Polarized Light Guide Prism System;Key Engineering Materials;2014-04