Affiliation:
1. Peking University
2. The 5th Electronics Research Institute of the Ministry of Industry and Information Technology
Abstract
In this paper, an integrated 3-axis MEMS accelerometer was analyzed. Because of asymmetrical structure, z-axis sensing element, which was imbedded in the proof mass of lateral accelerometers, had large mechanical coupling. Simulation result showed that the cross talk in z-axis was as high as 64.3%. To solve the problem, a fully symmetrical structure with vertical springs was adopted in z-axis sensing element. The movement of z-axis was linear vertical displacement instead of torsional displacement. Simulation results showed there was no obvious cross talk in z-axis sensing element.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference10 articles.
1. Hao Luo: Integrated multiple device CMOS-MEMS IMU systems and RF MEMS applications, PhD thesis, Carnegie Mellon University (2002).
2. Hongwei Qu: Development of DRIE CMOS-MEMS process and integrated accelerometers, PhD thesis, University of Florida (2006).
3. Haitao Ding, Jian Cui, Xuesong Liu, Xiaozhu Chi, Zhenchuan Yang, Guizhen Yan: A highly double-decoupled self-oscillation gyroscope operating at atmospheric pressure, Sensors 2008 IEEE, Oct. 2008, pages: 674 – 677 (2008).
4. Alper S.E., Akin T.: High-Performance SOI-MEMS Gyroscope with Decoupled Oscillation Modes, Micro Electro Mechanical Systems, MEMS 2006 Istanbul. 19th IEEE International Conference on, pages: 70 – 73 (2006).
5. W. Geiger, B. Folkmer, U. Sobe, H. Sandmaier, W. Lang: New designs of micromachined vibrating rate gyroscopes with decoupled oscillation modes, TRANSDUCERS '97 Chicago., 1997 International Conference on, Volume 2, 16-19 June 1997 Page(s): 1129 – 1132 (1997).