Affiliation:
1. Lanzhou Institute of Physics
Abstract
Samples of DLC thin films with different Cu concentration were prepared by using a Cu target and different number of graphite target，or adding a grid before the Cu target. The results show that the hardness and stress decreases with an increase of Cu concentration (below 6.3 at.%). When Cu concentration increases from 6.3 at.% to 17.8 at.%, the hardness and stress keep almost constant, and the friction coefficient increases gradually and slowly, as well as the wear loss.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference11 articles.
1. Ueng H Y, Guo C T. Diamond-like carbon coatings on microdrill using an ECR-CVD system [J]. Applied Surface Science, Vol. 249 (2005), p.246.
2. Narayan Roger Jagdish. Pulsed laser deposition of functionally gradient diamondlike carbon–metal nanocomposites [J]. Diamond & Related Materials, Vol. 14(2005), p.1319.
3. Hsieh W P, Wang D Y, Shieua F S. Characterization of the Ti-doped diamond-like carbon coatings on a type 304 stainless steel [J]. J. Vac. Sci. Technol. A, Vol. 17 (1999), p.1053.
4. Tiana Jingze, Zhang Qing, Zhou Q, et al. Correlation between adhesion of diamond-like carbon film on LiTaO3 substrate and SAW velocity [J]. Surface &Coatings Technology Vol. 198(2005), p.198.
5. Bonetti L F, Capote G., Santos L V, et al. Adhesion studies of diamond-like carbon films deposited onTi6Al4V substrate with a silicon interlayer [J]. Thin Solid Films, Vol. 515(2005), p.375.
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