The Application of a Grating Tiling Device with Parallel Mechanism in an Inertial Confinement Fusion (ICF) System

Abstract

The size of pulse compression gratings (PCG) is very big in the ICF system, so we obtained a large size grating by mechanically stitching small caliber gratings. And we design the splicing mechanism to be a 5-DOF Parallel Mechanism with macro/micro dual feed drive control to meet the requirements of large travel, high precision, high stability and 5-DOF of the grating tiling. The macro-moving part is designed to be the 5PTS-1PPS parallel mechanism, using the Feed Mechanism of ballscrew with Stepper Motor Drive.The micro-moving part is designed to be 5TSP-1PPS parallel mechanism, using the feed mechanism of Flexure Hinge with Piezoelectric Ceramic Actuator. We derived control algorithm of parallel mechanism by the method of the Kinematics of parallel mechanism. We analyzed the systematic error and put forward the error correction method in order to improve the positioning accuracy. At last, we designed an optical detecting system to evaluate the feasibility of this scheme, the positioning accuracy and the Stability of parallel Splicing structure. The results showed that the mechanism performance can meet the requirements of grating tiling work.