Research on Preparation Band-Pass Filter by Lon Beam Sputtering

Abstract

According to the requirement of the filter for laser tracking system, we chose Ta as the target material of high refractive index and SiO2 as the target material of low refractive index, the film system was designed and optimized with the TFCalc software, adopted the double ion sputter coaters by VEECO company for plating system, using two sides of the substrate to broaden the long and short wavelength cut-off band respectively, we improved the peak transmittance and simplified the difficulty of experimental analysis, the filter to meet the demand has been deposited. The average transmittance of the filter at 532nm, 808nm, 1064nm and1550nm wavelength was less than 0.2% and the peak transmittance at 905nm wavelength was 96.3%. The filter can withstand the test of bad environment and satisfy the requirements of the laser tracking system.