Affiliation:
1. Jiangxi Science and Technology Normal University
Abstract
CrN coatings have been deposited successfully by Closed Filed Unbalanced Magnetron Sputter Ion Plating (CFUMSIP). The effect of substrate temperature (TS) and bias voltage (VB) together on microstructure, morphologies and mechanical properties of CrN coatings were studied. The results showed that the deposition rate of CrN coatings declines with the increase of VB Under both room temperature (R.M.) and 300°C. The FCC-CrN disappeared gradually and orth-CrN arised with the increase of VB, and the TS promoted the transformation from FCC - CrN to orth - CrN. The surface morphology of CrN coatings with changed VBs was greatly different, and VB could further improve the mechanical properties of coatings. In this paper, the CrN coating with the parameters (TS =300°C, VB =-30V) had relatively high deposition rate and mechanical properties.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference11 articles.
1. S. Luca, G. F. Maria, L. Beatriz. Properties and performances of innovative coated tools for turning inconel, Machine Tools &Manufacture. 48(2008)815-823.
2. J.L. Mo, M.H. Zhu. Tribological characterization of chromium nitride coating deposited by filtered cathodic vacuum arc, Applied Surface Science. 255(2009)7627-7634.
3. X.S. Wan, Y.Y. Shi, J. Ma, et al. Salt spray corrosion behaviour of CrN coatings deposited by arc ion plating, Acta Metallurgica Sinica. 46(2010)600-606.
4. R. Cecchini, A. Fabrizi, M. Cabibbo, et al. Mechanical, microstructural and oxidation properties of reactively sputtered thin Cr-N coatings on steel, Thin Solid Films. 519(2011)6515-6521.
5. M.D. Huang, G.Q. Lin, C. Dong, et al. Mechanism of effect of bias on morphologies of films prepared by arc ion plating, ACTA METALLURGICA SINICA. 39(2003)510-515.
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献