Affiliation:
1. National University of Defense Technology
Abstract
Due to many inherently problems of accelerometers on market, such as complex fabrication process and low precision, a monolithic three-axis accelerometer is proposed and fabricated. The 3-axis accelerometer consists of four individual seismic mass, each has a wafer-thick of 240μm and is fabricated by anisotropic wet etching technology. In this paper, the design, fabrication, and characterization of the 3-axis accelerometer are presented. The performance is characterized and demonstrated.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
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