Abstract
Thin films of (La,Sr)MnO3 (LSMO) were fabricated by industrial-versatile chemical solution deposition (CSD) technique. Well [100]-oriented LSMO films were fabricated at 650-750 °C by use of buffer layers of LaNiO3 buffer layer on a silicon substrate. The product of lower electrical resistivity is promising as an electrode of fatigue-free ferroelectric capacitor.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference10 articles.
1. R. Ramesh, H. Gilchrst, T. Sands, V. G. Keramidas, R. Haakenaasen and D. K. Fork: Appl. Phys. Lett. Vol. 63 (1993) p.3592.
2. M. A. Hayward and M. J. Rosseinsky: Chem. Mater. Vol. 12 (2000) p.2182.
3. K. P. Rajeev, G. V. Shivashankar and A. K. Raychaudhuri: Sol. Stat. Commun. Vol. 79 (1991) p.591.
4. M. -S. Chen, J. -M. Wu and T. -B. Wu: Jpn. J. Appl. Phys. Vol. 34 (1995) p.4870.
5. C. B. Eom, R. B. Van Dover, Julia M. Phillips, D. J. Werder, J. H. Marshall, C. H. Chen, R. J. Cave and R. M. Fleming: Appl. Phys. Lett. Vol. 63 (1993) p.2570.