Sensitive Elements of High Temperature Pressure Sensors Formed from a Doped Polycrystalline Diamond-Reference-Cited by-同舟云学术

Sensitive Elements of High Temperature Pressure Sensors Formed from a Doped Polycrystalline Diamond

Published:2021-05 Issue: Volume:1031 Page:178-183
ISSN:1662-9752
Container-title:Materials Science Forum
language:
Short-container-title:MSF

Author:

Vysotina Elena¹,Rizakhanov Razhudin¹,Sigalaev Sergey¹,Polushin Nikolay²,Shokorov Vadim³,Mishanin Aleksandr³

Affiliation:

1. SSC FCUE «Keldysh Research Centre»

2. National University of Science and Technology “MISIS”

3. SC «State Research Institute of Physical Measurements»

Abstract

The need to create highly accurate pressure sensors that capable operate under extreme conditions in aviation, rocket and space equipment increases and becomes more relevant. The unique properties of diamond make it a promising material for microelectronic sensors. Sensitive elements of pressure sensors were developed where a resilient element is formed from silicon but resistance strain gauges are formed from a boron-doped polycrystalline diamond film.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

https://www.scientific.net/MSF.1031.178.pdf

Reference11 articles.

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