Fabrication and Characterization of CdO Gas Sensor with Tube Shape

Abstract

The based semiconductor-metal oxide gas 3D-detector of cadmium oxide has been fabricated from cadmium chloride salt upon a glass substrate via the technique of spray pyrolysis with a thickness around (0.5 ± 0.01 μm) utilizing precursors in form of water soluble at a flat glass substrate and a tube hollow design. Three different dimensions were used at temperature 450oC±5, in 0.1 and 0.2 M concentration, and their gas sensing characteristics toward the (CO) and (NO) gases at various concentrations (50, 100, and 500 ppmv) in the air were studied at the room temperature which are related to oil industry. Different inspection distances (0, 1 and 5 m) were carried out. Furthermore, structural and morphology properties were inspected via X-Ray Diffraction (XRD), Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). The results manifested that the composition of the formative oxide CdO is related to the tested oxidation gases sensitivity. And, the installation of hollow design is best from flat to capture the gas molecules.