Analysis of Promising Areas for Creating Materials of Micromechanical Devices-Reference-Cited by-同舟云学术

Analysis of Promising Areas for Creating Materials of Micromechanical Devices

Published:2021-02 Issue: Volume:1022 Page:105-111
ISSN:1662-9752
Container-title:Materials Science Forum
language:
Short-container-title:MSF

Author:

Bibikov Sergey¹,Kalinkina Mariia¹,Kuznetsov Aleksandr¹,Pevneva Anna¹,Pirozhnikova Olga¹,Tkalich Vera¹

Affiliation:

1. ITMO University

Abstract

In this work, data on the development of such an important section of Electrical Engineering as “Electrical conductors and methods for their manufacture” are gathered together. The information collected will allow you to compare different materials suitable for the manufacture of electrically conductive structures. The paper also has a history of the development of this section, as well as a patent study of relevant and unusual methods for the manufacture of electrical conductors.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

https://www.scientific.net/MSF.1022.105.pdf

Reference15 articles.

1. Y.M. Becker, Materials for microelectronic computers, Leningrad LITMO, (1979).

2. V.I. Margolin, V.A. Zhabrev, V.A. Tupik, Physical foundations of microelectronics, Moscow Publishing Center Academy,, (2008).

3. V.V. Pasynkov, V.S. Sorokin, Materials of electronic technology, 6th erased ed St Petersburg Publishing House Lan,, (2004).

4. S.V. Bibikov, M.E. Kalinkina, A.G. Korobeynikov, O.I. Pirozhnikova, A. Romanova, V.L. Tkalich, N.A. Shmakov, Recearch for promising materials and constructive-technological solutions for temperature-sensitive elements of micromechanical accelerometers, Journal of Phys: Conf. Ser. 1260 (6) (2019) 062002.

5. V.S. Sorokin, B.L. Antipov, N.P. Lazareva, Materials and elements of electronic technology, M Publishing Center Academy, v. 1 Conductors semiconductors dielectrics, (2006).