A New Technique for Analyzing Defects in Silicon Carbide Devices: Electrically Detected Electron Nuclear Double Resonance

Author:

Waskiewicz Ryan J.1,Manning Brian R.1,McCrory Duane J.2,Lenahan Patrick M.1

Affiliation:

1. Pennsylvania State University

2. Keysight Technologies

Abstract

We show that electrically detected electron nuclear double resonance (EDENDOR) can be detected with relatively high signal-to-noise ratios in fully processed 4H-SiC bipolar junction transistors (BJTs). We observe EDENDOR of nitrogen interacting with recombination center defects in the depletion region of forward-biased emitter-base junctions of these devices at room temperature. Our results indicate that EDENDOR has great potential in the investigation of SiC-based devices specifically, as well as in the investigation of solid-state devices based upon other material systems.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference29 articles.

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3. W. Gordy, Theory and Applications of Electron Spin Resonance. New York: John Wiley & Sons, Inc., (1980).

4. L. Kevan and L. D. Kispert, Electron Spin Double Resonance Spectroscopy. New York: John Wiley & Sons, Inc., (1976).

5. W. L. Warren and P. M. Lenahan, Electron-nuclear double-resonance and electron-spin-resonance study of silicon dangling-bond centers in silicon nitride,, Phys. Rev. B, vol. 42, no. 3, p.1773–1780, (1990).

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