Affiliation:
1. Belarusian State University of Informatics and Radioelectronics
2. B.I. Stepanov Institute of Physics
3. INTEGRAL Joint Stock Company
Abstract
The review reports on the results of our research work on nanostructured metal films onto porous silicon. Principal steps of the techniques allowing fabrication of metal films completely inheriting morphological pattern of different types of porous silicon are presented. It is shown, that giving of the nanostructured pattern to metal films by means of porous silicon template opens their new structural, optical, mechanical and electrical properties, which can be successfully applied in nanoelectronics and biomedicine, particularly including devices based on superconductivity effect, SERS analysis with picomolar sensitivity and transdermal drug delivery by electroporation.
Publisher
Trans Tech Publications, Ltd.
Cited by
6 articles.
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