Photo-Electrochemical Properties of Titanium Dioxide Thin Films Prepared by Reactive RF Sputtering Method

Abstract

The photo-electrochemical properties of photocatalytic titanium dioxide thin films obtained by reactive RF magnetron sputtering were investigated. The pressure during the sputtering deposition affected the photocatarytic activity and photo-induced hydrophilicity, and at 2 Pa the highest activities were observed. The photocurrent under ultraviolet light illumination corresponded to the photo-induced activities of the films. It is suggested that the band bending near the surface is one of the most crucial factors determines the activities of photo-induced behavior of the titanium dioxide thin films.