Affiliation:
1. Meiji University
2. JST-CREST
3. University of Hyogo
4. National Institute for Materials Science
Abstract
We investigated the new materials applicable for the field effect passivation layer in crystalline Si solar cells, ZrO2-Al2O3 and ZrO2-Y2O3 binary systems, by using combinatorial synthesis method. As-deposited samples indicated hysteresis curves and flat band-voltage (VFB) shifts at capacitance-voltage (C-V) measurements. After oxygen gas annealing (OGA) at 700 oC for 5min, an improvement of the hysteresis and a positive shift of VFB were observed. OGA process influenced defects density related to decreasing oxygen vacancy. OGA processed ZrO2 incorporated with 20 % Al2O3 and 15 % Y2O3 structures showed the maximized negative fixed charge of -5.8 × 1012 cm-2 and -7.8 × 1012 cm-2 in each system, respectively, suggesting that the ZrO2 based alloy systems were revealed to be the promising material for the passivation in the solar cell application.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
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