Microstructure, Mechanical and Tribological Properties of the Tialn Coatings after Nb and C Dual Ion Implantation

Abstract

Ion implantation is an effective method to enhance hardness and wear resistance of the TiAlN coatings. In this paper, Nb and C ions are co-implanted into TiAlN coatings deposited by Magnetic Filter Arc Ion Plating (MFAIP), using a Metal Vacuum Vapor Arc (MEVVA) ion source implantor with doses of 1×1017and 5×1017ions/cm2. The microstructure, chemical composition, mechanical and tribological properties of Nb+C-implanted TiAlN coatings have been investigated by glancing incidence X-ray diffraction, X-ray photoelectron spectroscopy, nanoindentation test and SRV friction & wear tester, respectively. The results showed that the NbN and TiC phases could be detected both from the XRD and XPS profiles of as-prepared films. Nb and C ion implantation could improve the hardness, plastic deformation resistance and wear behavior of TiAlN coatings due to the energetic Nb and C ion bombardment and the formation of NbN and TiC phases.