Composite Thin Film Obtained Using Tetraethoxysilane and Aimed at VOCs Detection-Reference-Cited by-同舟云学术

Composite Thin Film Obtained Using Tetraethoxysilane and Aimed at VOCs Detection

Published:2012-11 Issue: Volume:730-732 Page:185-190
ISSN:1662-9752
Container-title:Materials Science Forum
language:
Short-container-title:MSF

Author:

Hernandez Leonardo F.¹,Lima Roberto R.¹,Pecoraro Edson²,Rosim-Fachini Esteban³,da Silva Maria L.P.¹

Affiliation:

1. University of São Paulo

2. University of Aveiro

3. University of Puerto Rico at Río Piedras

Abstract

The aim of this work was production of tetraethoxysilane (TEOS) plasma polymerized thin films and optimization of their physical-chemical characteristic for sensor development. The films were analyzed using several techniques. It was possible to produce composites (graphite clusters imbibed by silicon oxide film) made from only one reactant (TEOS). Deposition rate can vary significantly, reaching a maximum of 30 nm/min; cluster formation and their size widely depending on deposition parameters. The film surface was hydrophobic but can be wetted by organic compounds, probably due to carbon radicals. These films are good candidates for sensor development.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

https://www.scientific.net/MSF.730-732.185.pdf

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