Study of Microstructures in Single Crystalline Chemical Vapor Deposited Diamond Thin Films
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Published:2011-12
Issue:
Volume:702-703
Page:1015-1018
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ISSN:1662-9752
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Container-title:Materials Science Forum
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language:
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Short-container-title:MSF
Author:
Jain Lokendra1, Mohapatra D.R.1, Bajpai R.1, Basu Ritwik1, Misra D.S.1, Samajdar Indradev1
Affiliation:
1. Indian Institute of Technology (IIT) Bombay
Abstract
Homo-epitaxial (100) single crystal diamond films of different isotopic (13C) composition were synthesized by micro-wave plasma chemical vapor deposition (MPCVD). Undoped 12C (100) films were also synthesized at different thicknesses. The growth surface of 13C doped showed a sequential morphological change from flat surface to stepped or ledge surface and coarsening of the steps/ledges with the increase of 13C-isotope concentration. As the growth proceeds via surface steps/ledges and coarsening of these steps/ledges, further increase in imperfection of the grown CVD single crystal diamonds observed with the development of non-(100) orientations. In case of undoped 12C samples, as the thickness increased the in-grain misorientation got reduced.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
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