Affiliation:
1. Nippon Steel Corporation
2. Kwansei Gakuin University
Abstract
Sublimation-recrystallization processes occurring during PVT are investigated from the viewpoint of quasi-equilibrium phase transitions of SiC. In addition to the elemental reaction processes of PVT, other phenomena such as silicon droplet formation and in-situ etching are also discussed based upon the Si-C binary phase diagram, and possible mechanisms are proposed.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Cited by
4 articles.
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