Low-Loss Transmission Characteristics of Transparent Conductive Thin Films in GHz Range

Author:

Ogino Tsuyoshi1,Ohashi Naoki2ORCID,Hishita Shunichi3,Sakaguchi Isao3,Adachi Yutaka3,Nakajima Kunihiko1,Haneda Hajime3

Affiliation:

1. Taiyo Yuden Co., Ltd.

2. National Institute for Materials Science (NIMS)

3. National Institute for Materials Science

Abstract

The resistivity of transparent conductive thin film formed by sputtering exhibits a dependence on film thickness. In this study, an analysis by electromagnetic field simulation of resistance effect on the transmission characteristics was carried out. The overall resistance of the signal waveguide governs the transmission characteristics, and variation of the resistance at the interface between the substrate and the thin film has no significant effect. We evaluated a structure in which fine metal wiring that is not visible to the eye is placed on transparent conductors to reduce the resistance of the transmitting waveguide. Electromagnetic field simulations suggest that this structure improves the transmission characteristics while keeping high transparency.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference2 articles.

1. N. Guan, H. Furuya, K. Himeno, K. Goto and K. Ito: IEICE Trans., vol. E90-B, no. 9, pp.2219-2224.

2. K. Oshima, N. Kidera, K. Niwano, K. Ikawa, R. Sonoda. And S. Kawasaki: IEEE MTT-S Int. Microwave Symp. Dig., pp.1569-1572, (2002).

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