Morphological, Structural and Electronic Damage on InAs and InSb Surfaces Induced by (Reactive) Ion Beam Etching
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Published:2000-08
Issue:
Volume:183-185
Page:127-146
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ISSN:1662-9507
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Container-title:Defect and Diffusion Forum
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language:
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Short-container-title:DDF
Author:
Frost F.1,
Lippold G.1,
Schindler A.1,
Bigl F.1
Affiliation:
1. Leibniz-Institut für Oberflächenmodifizierung
Publisher
Trans Tech Publications, Ltd.
Subject
Condensed Matter Physics,General Materials Science,Radiation