Energetics of Extrinsic Defects in Si and their Role in Nonequilibrium Dopant Diffusion
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Published:2000-08
Issue:
Volume:183-185
Page:199-206
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ISSN:1662-9507
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Container-title:Defect and Diffusion Forum
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language:
-
Short-container-title:DDF
Author:
Cristiano Fuccio1,
Colombeau B.2,
Claverie A.2
Affiliation:
1. University of Toulouse
2. CEMES
Publisher
Trans Tech Publications, Ltd.
Subject
Condensed Matter Physics,General Materials Science,Radiation
Cited by
1 articles.
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1. Ion Implantation;Handbook of Semiconductor Manufacturing Technology, Second Edition;2007-07-09