Abstract
This paper presents a new control method of the Z-direction module of STM (scanning tunnel microscope). The major component of our method is a dual-servo mechanism, which is consist of a PZT (Piezoelectric Transducer) and a motorized micro displacement stage. Traditionally, STM employs PZT as the servo scanner, which provides very high precision but has a small range. The mean idea of our method is compensating the insufficient measuring range of the PZT through a motorized micro displacement stage. Our method succeeds to eliminates the limitation of measuring range of PZT and enlarges the vertical measurement scale of STM from sub-micrometer to sub-millimetre.
Publisher
Trans Tech Publications, Ltd.
Reference6 articles.
1. M. Holmesa, R. Hockena, D. Trumperb，in: The Long-range Scanning Stage: A Novel Stage for Scanned-probe Microscopy, Precision Engineering, Vol 24 (2000) 191–209.
2. Y.L. Chen, B.F. Ju, in: A Novel Scanning Tunneling Microscope for Long Range and High Aspect Ratio Measurement, 10th International Symposium on Measurement and Quality Control (2010).
3. J. Fu, R.D. Young, T.V. Vorburger, in: Long-range Scanning Tunneling Microscaopy, submitted to AIP, Rev. Sci. Instrum. 63, No. 4, April (1992).
4. B.F. Ju, Y.L. Chen, Y.Z. Ge, in: The Art of Electrochemical Etching for Preparing Tungsten Probes with Controllable Tip Profile and Characteristic Parameters, submitted to AIP, Rev. Sci. Instrum. Vol82, 013707 (2011).
5. J. Scheuring, W. Clauss, D. P. Kern, in: Self-optimizing and Adaptive Digital Signal Processor Based Algorithms in Scanning Tunneling Microscopy, submitted to AIP, Rev. Sci. Instrum. Vol69, No12 (1988).