The Resistance of Micro-Fabricated Hollow Wire at Giga-Hertz Range

Abstract

In this paper we investigate the resistance of micro hollow wire at Giga-hertz range. In order to get the optimum method, deduction in resistance can be achieved using hollow wire with optimum wall thickness. In the analysis the H field phase in the non-hollow wire changes periodically versus r with a period two times optimum wall thickness. More interesting thing is that the resistance of interconnect can be optimized by using hollow wire with optimum wall thickness. The optimum wall thickness is proportional to skin depth. The phase abrupt change point of H field has important relationship with the optimum wall thickness. Theoretical analysis and calculation indicate that the cylindrical hollow wire can achieve 8% resistance deduction. Similar results for rectangular hollow wire are also got using FEA commercial software.