Affiliation:
1. Hebei University of Technology ,
2. Hebei University of Technology
3. Tianjin University
Abstract
Silicon etching is an essential process step for the fabrication of micro-electro-mechanical systems (MEMS). However, the rough edge of the silicon etching technology has some resistance to microspheres. This study presents fabrication process of the SU-8 photoresists mold which provides sharp edges and smooth sidewalls of the channel and details the RIE bonding of PDMS and glass substrate to realize the fabrication of microfluidic chips. This paper also investigates the hydrodynamic focusing and microsphere single-pass based on sheath flow with the aid of the plunger piston, which is important to the further combination of the microfluidic chip and the flow cytometry.
Publisher
Trans Tech Publications, Ltd.
Reference12 articles.
1. Clemmens J, Hess H, Doot R, Motorprotein roundabouts: Lab Chip Miniaturisation Chem. Biol. Vol. 4 (2004), p.83.
2. Petersson F, Nilsson A, Holm C: Lab Chip Miniaturisation Chem. Biol. Vol. 5 (2005), p.20.
3. Sia S K, Linder V, Parviz B A: Angew. Chem. Int. Ed. Vol. 43 (2004), p.498.
4. Nguyen N T, Wereley S T: Fundamentals and Applications of Mi-crofluidics, Artech House, Boston (2002).
5. J. Yang, Y. Huang, X.B. Wang: Anal. Chem. Vol. 71 (1999), p.911.