Synthesis of Si-O-C Nanoballs by CVD of Polydimethylsiloxane

Abstract

Here we reported that the Si-O-C nanoballs (SCONBs) were yielded from polyorganosiloxane, polydimethylsiloxane, by chemical vapor deposition (CVD) method. The composite nanoballs with a range of diameters from 50 to 200nm were composed of silicon, carbon and oxygen based on analysis of EDX. At the transmission electron microscope(TEM) and scan electronic microscope(SEM), two populations of nanoballs were found: around 200nm and 500nm. X-ray diffraction patterns demonstrated that the nanoballs were dominatingly amorphous. Temperature played an key role in size distribution of Si-O-C nanoballs, and the 850–900°C temperature range was typical for nanoparticles growth via CVD.