Effect of the Y2O3 Addition Content on the Structural Properties of ZrO2 Thin Films and Coating Material

Abstract

The influence of addition of Y2O3on the structure of ZrO2thin films and bulk material was studied employing X-ray diffraction (XRD) analysis. The films were prepared by the electron-beam evaporation method. XRD analysis permits the study of the stabilization process. For pure ZrO2thin film and coating material, the crystallographic structure is monoclinic phase; with increasing Y2O3mole percent, the structure of Y2O3stabilized ZrO2(YSZ) material changes from a mixture of monoclinic and cubic phase to a single cubic phase. Furthermore, calculated results of grain size show that YSZ thin film and coating material have the same crystallization trend.