Affiliation:
1. Anhui University of Architecture
Abstract
An experimental device of KOH solutions jet-assisted laser etching is designed, Laser-chemical combined etching technology is combined with the Medium-jet erosion processing ,and the influence on the etching capacity and cross section quality of material sample of laser processing parameters,jet processing parameters are studied. The results show that the laser processing parameters and jet processing have a decisive impact on the quality of the workpiece, the composite processing technology can remove most of melting slag which are produced by the laser processing, the surface roughness are effectively reduced. The blind holes of the machined materials have the regular shape.
Publisher
Trans Tech Publications, Ltd.
Reference7 articles.
1. R. Bo¨hme, K. Zimmer. Low roughness laser etching of fused silica using[J]. Applied Surface Science, Vol. 239 (2004), p.109–116.
2. Genfu Yuan, Wei Zheng, Xuehui Chen, Ma yuping. Research Progress of Laser Assisted Liquid Compound Machining. Advanced Materials Research, 2011, Vols(189-193), (2011), pp.3750-3754.
3. Yuhong Long, Tielin Shi, Liangcai Xiong. Excimer laser electrochemical etching n-Si in the KOH solution[J]. Optics and Lasers in Engineering, 2010, Vol. 48(2010), p.570–574.
4. Genfu Yuan, Yansheng Yao, Xuehui Chen, Huaqi Liang, Shaofeng Zhu. Experimental Study on the Quality of Material Surface Applied Laser-Chemical Combined Etching[J]. Chinese Journal of Lasers, Vol. 37, (2010), pp.281-283. (in chinese).
5. Liming Cai, Yuyong Lei, Longjian Bing, Lingbo Tang. Application of Water-jet-guided Laser Technologyin Micro-machining[J]. Microfabrication Technology, 2008, Vol. (5), 2008, pp.60-64. (in chinese).
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Laser drilling of structural ceramics—A review;Journal of the European Ceramic Society;2017-04