Affiliation:
1. North University of China
Abstract
Optical microcavities confine light to small model volumes and have ultrahigh quality factor (Q), especially microtoroid cavities, having very broad application prospects. In this paper, we use MEMS (Microelectromechanical System) skills, such as lithography, dry etching to fabricated silica optical microdisks. And after that, a novel processing method based on CO2laser reflow technology is introduced to create microtoroid cavities. The processing details are discussed including light path, laser power and other important parameters. The quality factor of the planar microtoroid cavity was measured by taper-fiber coupling and the average value reach 4.8×105.
Publisher
Trans Tech Publications, Ltd.