Affiliation:
1. Sepandarmad Iranian Co.
2. University of Shahrekord
Abstract
In this paper, the static pull-in instability of torsional nanoelectromechanical systems (NEMS) with coupling effect between torsion and bending is investigated considering the effect of translation elastic boundary condition. A set of normalized equations governing the static actuation properties of the torsional actuator is derived to demonstrate the relationships between the parameters of static characteristics, such as torsion angle, vertical displacement, and applied voltage. The results from this model demonstrated that the real model of boundary condition (elastic boundary condition) is very important issue which must be considered in manufacturing process.
Publisher
Trans Tech Publications, Ltd.