Affiliation:
1. Slovak University of Technology
2. Slovak University of Technology in Bratislava
Abstract
Micromirrors fabricated by MEMS technology may be important sensing components in optical tracking systems used in many industrial applications. This paper deals with the analytical model of a 2-D gimbal mounted micromirror and with the simulation of a steady state response of the micromirror in Simulink. The model of a 2-D micromirror should be further used in a simulation of its dynamical behavior.
Publisher
Trans Tech Publications, Ltd.
Reference6 articles.
1. Yong Seop Yoon, Ki Deok Bae, Jin Hwan Kim, Hyung Choi, Byeong Cheon Koh: A low voltage actuated micromirror with an extra vertical electrode for 90◦ rotation. MEMS Lab., Samsung Advanced Institute of Technology, Yongin City, South Korea, (2003).
2. Toshiyoshi H, Fusita H: Electrostatic micro torsion mirrors for an optical switch matrix. J. Microelectromech. (1996).
3. Hao Z.: Techniques in the Design of Micro-Machined Electrostatic Torsion Micro-Mirrors and Their Applications. MEMS/NEMS Hanbook – Techniques and Aplications. Springer. (2006).
4. Weinberger S., Markweg E., Polster T., Hoffmann M.: Micromirror with Enlarged Static Deflection Based on Aluminium Nitride Springs. Ilmenau University of Technology, IMN MacroNano, Department of Micromechanical system, (2010).
5. Hiroshi Toshiyashi, Wibool Piyawattanametha, Cheng-Ta Chan, and Ming C. Wu, Linearization of Electrostatically Actuated Surface Micromachined 2D Optical Scanner, Journal of Microelectromechanical Systems, (2001).