Micro-Machined Variable RF Capacitor Based on Glass Substrate

Abstract

The RF applications like voltage controlled oscillators, tunable filters, resonators etc., requires variable capacitors in their design. This paper presents a novel micro variable capacitor consisting of fixed plate and moveable plate which is suspended by ‘S’ type springs. Micro variable capacitor can be electrostatically actuated via applied voltage to change the capacitance between the plates. The capacitance changes from15 pF to 22.5pF while applied voltage ranges from 0 to pull-in voltage. And micro variable capacitor based on glass Substrate was fabricated by simple micro electromechanical systems (MEMS) technology.