Characterization and Properties of CrN and CrBN Films

Abstract

The CrN films and CrBN films were successfully deposited by medium frequency magnetron sputtering in a mixture gas of nitrogen and argon. X-ray diffraction analysis shows that the CrN have preferential orientation of (111), (200) and (222). And the patterns of CrBN films is similar to that of CrN. The CrN films have smooth surfaces with dense and continuous microstructure and the CrBN films have glassy packed structure without columnar grains. The hardness of CrBN films were remarkable improved because of B attending.