Abstract
This paper investigates the short channel effects (SCE) of the recently proposed Singular Point Source MOS (S-MOS) SiC MOSFET. The study was carried out using 2D and 3D TCAD simulations for a planar, trench and S-MOS 1200V SiC MOSFETs for the IV output characteristics up to 1200V and under short circuit transient conditions. The S-MOS device shows no SCE up to the rated voltage when compared to reference planar and trench devices which exhibit strong SCE. This is due to the appropriate P++ protection of the N++ source and the electric field shielding due to the narrow mesa dimensions between orthogonal trenches where the channel is located.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
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1 articles.
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