Combined magnetron-laser deposition of titanium oxide thin-film plasmonic structures with silver nanoparticles

Abstract

In this work, we consider a method for producing film structures, which are a dielectric matrix with nanosized metal particles in it. The technique is implemented by the simultaneous use of magnetron sputtering and pulsed laser deposition. As a dielectric matrix, TiO2 films formed by magnetron sputtering are used. Metallic Ag particles were deposited from an erosive laser stream. The conditions for the implementation of the technique are presented: the relative position of the magnetron, laser target, and substrate; characteristics of laser radiation; magnetron discharge parameters; pressure and composition of the gaseous medium. Using the methods of spectrophotometry, scanning electron microscopy and atomic force microscopy, the optical and structural characteristics of coatings are determined. The coating thickness was determined, the prevailing particle size and their surface density were estimated. A significant effect of the frequency of laser pulses on the absorption and transmission of the plasmon surface resonance band, as well as the presence in the film structure of small-sized particles of the cathode material of the magnetron sputter, is established.