Realization of crystalline BaSi<sub>2</sub> thin films by vacuum evaporation on (111)-oriented Si layers fabricated by aluminum induced crystallization
Author:
Affiliation:
1. Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
2. Center for Crystal Science and Technology, University of Yamanashi, Kofu 400-8511, Japan
Publisher
The Japan Society of Applied Physics
Link
https://www.jstage.jst.go.jp/article/jjapcp/5/0/5_011201/_pdf
Reference17 articles.
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3. Y. Inomata, T. Nakamura, T. Suemasu, and F. Hasegawa, Jpn. J. Appl. Phys. 43, L478 (2004). https://doi.org/10.1143/JJAP.43.L478
4. K. Toh, K. O. Hara, N. Usami, N. Saito, N. Yoshizawa, K. Toko, and T. Suemasu, J. Cryst. Growth 345, 16 (2012). https://doi.org/10.1016/j.jcrysgro.2012.01.049
5. W. Du, M. Baba, K. Toko, K. O. Hara, K. Watanabe, T. Sekiguchi, N. Usami, and T. Suemasu, J. Appl. Phys. 115, 223701 (2014). https://doi.org/10.1063/1.4882117
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