Technology of FinFET for High RF and Analog/Mixed-Signal Performance Circuits

Author:

OHGURO Tatsuya1,INABA Satoshi1,KANEKO Akio1,OKANO Kimitoshi1

Affiliation:

1. Toshiba Corporation

Publisher

Institute of Electronics, Information and Communications Engineers (IEICE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. [1] D. Lederer, B. Parvais, A. Mercha, N. Collaert, M. Jurczak, J.-P. Raskin, and S. Decoutere, “Dependence of FinFET RF performance on fin width,” Proceeding of Silicon Monolithic Integrated Circuits in RF Systems 2006, pp.8–11.

2. [2] V. Subramanian, A. Mercha, B. Parvias, M. Dehan, G. Groeseneken, W. Sansen, and S. Decoutere, “Identifying the bottlenecks to the RF performance of FinFETs,” Proceedings of International Conference on VLSI Design 2010.

3. [3] Y. Choi, N. Lindert, P. Xuan, S. Tang, D. Ha, E. Anderson, T.-J. King, J. Bokor, and C. Hu, “Sub-20 nm CMOS FinFET technologies,” IEDM Tech. Dig., pp.421–424, Dec. 2001.

4. [4] A. Kaneko, A. Yagishita, K. Yahashi, T. Kubota, M. Omura, K. Matsuo, I. Mizushima, K. Okano, H. Kawasaki, S. Inaba, T. Izumida, T. Kanemura, N. Aoki, K. Ishimaru, H. Ishiuchi, K. Suguro, K. Eguchi, and Y. Tsunashima, “Sidewall transfer process and selective gate sidewall spacer formation technology for Sub-15nm FinFET with elevated source/drain extension,” IEDM Tech. Dig., pp.844–847, Dec. 2005.

5. [5] L. Zhong, A. Hojo, Y. Matsushita, Y. Aiba, K. Hayashi, R. Takeda, H. Shirai, H. Saito, J. Matsushita, and J. Yoshikawa, “Evidence of spontaneous formation of steps on silicon (100),” Phys. Rev. B, vol.54, no.4, pp.R2304–R2307, July 1996.

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