Effects of Fluorine Implantation on 1/f Noise, Hot Carrier and NBTI Reliability of MOSFETs
-
Published:2013
Issue:5
Volume:E96.C
Page:624-629
-
ISSN:0916-8524
-
Container-title:IEICE Transactions on Electronics
-
language:en
-
Short-container-title:IEICE Trans. Electron.
Author:
JANG Jae-Hyung1, KWON Hyuk-Min1, KWAK Ho-Young1, KWON Sung-Kyu1, HWANG Seon-Man1, SHIN Jong-Kwan1, SUNG Seung-Yong1, CHUNG Yi-Sun2, LEE Da-Soon2, LEE Hi-Deok1
Affiliation:
1. Dept. of Electronics Engineering, Chungnam National Univ. 2. Magnachip Semiconductor Inc.
Publisher
Institute of Electronics, Information and Communications Engineers (IEICE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Reference26 articles.
1. [1] R. Brederlow, W. Weber, R. Jurk, C. Dahl, S. Kessel, J. Holz, W. Sauert, P. Klein, B. Lemaitre, D.S. Landsiedel, and R. Thewes, “Influence of fluorinated gate oxides on the low frequency noise of MOS transistors under analog operation,” Solid-State Device Research Conference, pp.472-475, Sept. 1998. 2. [2] S.K. Kwon, H.Y. Kwak, H.M. Kwon, J.H. Jang, Y.J. Jung, S.S. Kim, D.S. Lee, J.K. Lee, S.J. Lee, and H.D. Lee, “Dependence of 1/f noise characteristics of NMOSFETs on body bias and temperature in sub-threshold region,” International Semiconductor Device Research Symposium, pp.1-2, 2011. 3. [3] I.S. Han, H.M. Kwon. J.D. Bok, S.K. Kwon, Y.J. Jung, W.I. Choi, D.S. Choi, M.G. Lim, Y.S. Jung, J.H. Lee, G.W. Lee, and H.D. Lee, “Effect of nitrogen concentration on low-frequency noise and negative bias temperature instability of p-channel metal-oxide-semiconductor field-effect transistors with nitrided gate oxide,” Jpn. J. Appl. Phys., vol.50, no.10, 10PB03, 2011. 4. [4] Y. Yasuda and C. Hu, “Effect of fluorine incorporation on 1/f noise of HfSiON FETs for future mixed-signal CMOS,” International Electron Devices Meeting (IEDM), pp.1-4, 2006. 5. [5] M.M. Nelson, K. Yokoyama, M. Thomason, G. Scott, and B. Greenwood, “Efficacy of fluorine doping at various stages on noise reduction,” IEEE Workshop on Microelectronics and Electron Devices (WEMD), pp.17-20, 2005.
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
|
|