An Application of Laser Annealing Process in Low-Voltage Power MOSFETs

Author:

CHEN Yi1,OKADA Tatsuya1,NOGUCHI Takashi1

Affiliation:

1. University of the Ryukyus

Publisher

Institute of Electronics, Information and Communications Engineers (IEICE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. [1] B.J. Baliga, “Vertical Field Effect Transistors having improved Breakdown Voltage Capability and Low On-state Resistance,” U.S. Patent # 5,637,898, Issued June 10, 1997.

2. [2] L. Lorenz, G. Deboy, A. Knapp, and M. Marz, “COOLMOS-A New Milestone in High Voltage Power MOS,” IEEE International Symposium on Power Semiconductor Devices and ICs, pp.3-10, 1999.

3. [3] B.J. Baliga, Fundamentals of Power Semiconductor Devices (Springer, 2008).

4. [4] C. Ortolland, et al, “Optimized ultra-low thermal budget process flow for advanced High-K/Metal gate first CMOS using laser-annealing technology,” VLSI Technology, 2009 Symposium on, pp.38-39, 2009

5. [5] T. Noguchi, T. Nishinohara, J.D. Mugiraneza, K. Shirai, T. Okada, and T. Itoh, “Crystallization of amorphous silicon films on flexible glass by Blue-Multi-Diode-Laser Anealing as a new LTPS,” SID Symposium Digest of Technical Papers, vol.43, no.1, pp.1129-1132, 2012.

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3