Study on Impurity Distribution Dependence of Electron-Dynamics in Vertical MOSFET

Author:

MURAGUCHI Masakazu12,ENDOH Tetsuo12

Affiliation:

1. Center for Interdisciplinary Research, Tohoku University

2. JST-CREST

Publisher

Institute of Electronics, Information and Communications Engineers (IEICE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. [1] T. Endoh, T. Nakamura, and F. Masuoka, “An accurate model of fully-depleted surrounding gate,” IEICE Trans. Electron., vol.E80-C, no.7, pp.903-910, July 1997.

2. [2] T. Endoh, T. Nakamura, and F. Masuoka, “An analytic steady-state current-voltage characteristics of short channel fully-depleted surrounding gate transistor (FD-SGT),” IEICE Trans. Electron., vol.E80-C, no.7, pp.911-916, July 1997.

3. [3] Y. Norifusa and T. Endoh, “Scalability of vertical MOSFETs in sub-10nm generation and its mechanism,” IEICE Trans. Electron., vol.E93-C, no.5, pp.594-597, May 2010.

4. [4] T. Endoh, K. Kinoshita, T. Tanigami, Y. Wada, K. Sato, and K. Yamada, “Novel ultrahigh density Flash memory with a stacked-surrounding gate transistor (S-SGT) structural cell,” IEDM Tech. Dig., pp.33-36, 2001.

5. [5] R. Katsumata, M. Kito, Y. Fukuzumi, M. Kido, H. Tanaka, Y. Komori, M. Ishiduki, J. Matsunami, T. Fujiwara, Y. Nagata, Li Zhang, Y. Iwata, R. Kirisawa, H. Aochi, and A. Nitayama, “Pipe-shaped BiCS flash memory with 16 stacked layers and multi-level-cell operation for ultra high density storage devices,” Symp. VLSI Tech. Dig. Papers, pp.136-137, 2009.

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