An SOI bulk-micromachined dual SPDT RF-MEMS switch by layer-wise separation design of waveguide and switching mechanism-Reference-Cited by-同舟云学术

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An SOI bulk-micromachined dual SPDT RF-MEMS switch by layer-wise separation design of waveguide and switching mechanism

Published:2010 Issue:2 Volume:7 Page:80-85
ISSN:1349-2543
Container-title:IEICE Electronics Express
language:en
Short-container-title:IEICE Electron. Express

Author:

Yamane Daisuke¹,Sun Winston¹,Seita Harunobu²,Kawasaki Shigeo³,Fujita Hiroyuki¹,Toshiyoshi Hiroshi¹⁴

Affiliation:

1. Center for International Research on Micro Mechanics, Institute of Industrial Science, The University of Tokyo

2. Research Institute for Humanosphere, Kyoto University

3. Institute of Space and Astronautical Science, Japan Aerospace Exploration

4. Research Center for Advanced Science and Technology, The University of Tokyo

Publisher

Institute of Electronics, Information and Communications Engineers (IEICE)

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://www.jstage.jst.go.jp/article/elex/7/2/7_2_80/_pdf

Reference8 articles.

1. [1] G. M. Rebeiz, RF MEMS Theory, Design, and Technology, John Wiley & Sons, Inc., Hoboken, New Jersey, 2003.

2. RF MEMS switches and switch circuits

3. [3] G. M. Rebeiz, G.-L. Tan, and J. S. Hayden, “RF MEMS Phase Shifters: Design and Applications, ”IEEE Microw. Mag., vol. 3, no. 2, pp. 72-81, June 2002.

4. Micromachined low-loss microwave switches

5. RF MEMS membrane switches on GaAs substrates for X-band applications

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Integrated Magnetic MEMS Relays: Status of the Technology;Micromachines;2014-08-29

2. A Ku-band Dual-SPDT RF-MEMS Switch by Double-Side SOI Bulk Micromachining;Journal of Microelectromechanical Systems;2011-10

3. Capacitive RF switches manufactured by the CMOS–MEMS technique;Microelectronic Engineering;2011-08

4. A Fabrication Process of MEMS Coplanar Waveguides Using a Thick Plated Gold Layer as DRIE Mask;IEEJ Transactions on Sensors and Micromachines;2011

5. A 12GHz bulk-micromachined RF-MEMS phase shifter by SOI layer-separation design;IEICE Electronics Express;2010

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