Fabrication of embossed capacitive micromachined ultrasonic transducers using sacrificial release process-Reference-Cited by-同舟云学术

Fabrication of embossed capacitive micromachined ultrasonic transducers using sacrificial release process

Author:

Yu Yuanyu¹,Wang Jiujiang²³,Pun Sio Hang²,Cheng Ching-Hsiang⁴,Lei Kin Fong⁵⁶,Vai Mang I²³,Zhang Shuang²³⁷,Mak Peng Un³⁸

Affiliation:

1. School of Information Engineering, Lingnan Normal University

2. State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau

3. Department of Electrical and Computer Engineering, Faculty of Science and Technology, University of Macau

4. School of Automotive Engineering, Wuhan University of Technology

5. Graduate Institute of Medical Mechatronics, Chang Gung University

6. Department of Radiation Oncology, Chang Gung Memorial Hospital

7. College of Computer Science, Neijiang Normal University

8. On leave to Department of Chemical Engineering and Biotechnology, University of Cambridge

Publisher

Institute of Electronics, Information and Communications Engineers (IEICE)

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

Reference17 articles.

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